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CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity

  • S Kal
  • , S Das
  • , Davendra Kumar Maurya
  • , K Biswas
  • , A Ravi Sankar
  • , S K Lahiri

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)22 - 30
Number of pages9
JournalMicroelectronics Journal
Volume37
Issue number1
Publication statusPublished - 2006
Externally publishedYes

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