CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity

S Kal, S Das, Davendra Kumar Maurya, K Biswas, A Ravi Sankar, S K Lahiri

Research output: Contribution to journalArticleResearchpeer-review

55 Citations (Scopus)
Original languageEnglish
Pages (from-to)22 - 30
Number of pages9
JournalMicroelectronics
Volume37
Issue number1
Publication statusPublished - 2006
Externally publishedYes

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