Circular grating moiré deflectometry analysis by zeroth and first radial fringe order angle measurement

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Abstract

The previous method of counting integer fringe orders in circular grating moiré deflectometry yields inaccurate measurements. One way to improve the measurement accuracy with this method is by lowering the grating pitch. The attendant higher cost and possible encroachment of the diffraction limit, however, restricts the practicality of this approach. An alternative analysis method, which measures the angle between the zeroth and first radial fringe order, is presented in this paper to overcome this problem.

Original languageEnglish
Pages (from-to)344-346
Number of pages3
JournalOptics Communications
Volume129
Issue number5-6
DOIs
Publication statusPublished - 1 Sep 1996
Externally publishedYes

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