Characterization of optical accelerometers based on UV-sensitive polymers

Andreu Llobera, Volker Seidemann, José A. Plaza, Víctor Javier Cadarso, Stephanus Büttgenbach

Research output: Contribution to journalArticleResearchpeer-review

7 Citations (Scopus)

Abstract

The design, simulation, fabrication, and characterization of quad-beam polymer optical accelerometers is presented in this paper. An applied acceleration causes a misalignment between the waveguides that comprise the structure. Two different geometries with different beam widths have been tested. Both of them show high mechanical and optical sensitivity and negligible cross sensitivities. Self-alignment structures for fast and accurate fiber-optic positioning have also been implemented in the device. Stable, simple, and robust technology that only requires two technological steps is also presented. Static characterization shows experimental optical sensitivities of at least 15.8 and 6.2 dB/g for each optical accelerometer.

Original languageEnglish
Pages (from-to)412-418
Number of pages7
JournalIEEE Sensors Journal
Volume6
Issue number2
DOIs
Publication statusPublished - 1 Apr 2006

Keywords

  • Microoptoelectromechanical systems (MOEMS)
  • Optical accelerometers
  • Polymer technology
  • SU-8

Cite this