Characterization of optical accelerometers based on SU-8

A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, S. Büttgenbach

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.

Original languageEnglish
Article number59560W
Pages (from-to)1-11
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5956
DOIs
Publication statusPublished - 1 Dec 2005
EventIntegrated Optics: Theory and Applications - Warsaw, Poland
Duration: 31 Aug 20052 Sep 2005

Keywords

  • MOEMS
  • Optical accelerometers
  • Polymer technology
  • SU-8

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