The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.
|Number of pages||11|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|Publication status||Published - 1 Dec 2005|
|Event||Integrated Optics: Theory and Applications - Warsaw, Poland|
Duration: 31 Aug 2005 → 2 Sep 2005
- Optical accelerometers
- Polymer technology