Characterization of optical accelerometers based on SU-8

A. Llobera; V. Seidemann; J. A. Plaza; V. J. Cadarso; S. Büttgenbach

doi:10.1117/12.623057

Characterization of optical accelerometers based on SU-8

A. Llobera, V. Seidemann, J. A. Plaza, V. J. Cadarso, S. Büttgenbach

Research output: Contribution to journal › Conference article › Other

Abstract

The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.

Original language	English
Article number	59560W
Pages (from-to)	1-11
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5956
DOIs	https://doi.org/10.1117/12.623057
Publication status	Published - 1 Dec 2005
Externally published	Yes
Event	Integrated Optics: Theory and Applications - Warsaw, Poland Duration: 31 Aug 2005 → 2 Sept 2005

Keywords

MOEMS
Optical accelerometers
Polymer technology
SU-8

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10.1117/12.623057

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title = "Characterization of optical accelerometers based on SU-8",

abstract = "The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.",

keywords = "MOEMS, Optical accelerometers, Polymer technology, SU-8",

author = "A. Llobera and V. Seidemann and Plaza, {J. A.} and Cadarso, {V. J.} and S. B{\"u}ttgenbach",

year = "2005",

month = dec,

day = "1",

doi = "10.1117/12.623057",

language = "English",

volume = "5956",

pages = "1--11",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE - International Society for Optical Engineering",

note = "Integrated Optics: Theory and Applications ; Conference date: 31-08-2005 Through 02-09-2005",

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TY - JOUR

T1 - Characterization of optical accelerometers based on SU-8

AU - Llobera, A.

AU - Seidemann, V.

AU - Plaza, J. A.

AU - Cadarso, V. J.

AU - Büttgenbach, S.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.

AB - The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.

KW - MOEMS

KW - Optical accelerometers

KW - Polymer technology

KW - SU-8

UR - http://www.scopus.com/inward/record.url?scp=32344448713&partnerID=8YFLogxK

U2 - 10.1117/12.623057

DO - 10.1117/12.623057

M3 - Conference article

AN - SCOPUS:32344448713

SN - 0277-786X

VL - 5956

SP - 1

EP - 11

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 59560W

T2 - Integrated Optics: Theory and Applications

Y2 - 31 August 2005 through 2 September 2005

ER -

Characterization of optical accelerometers based on SU-8

Abstract

Keywords

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