Characterization of low-temperature MOCVD Cd1-xMnxTe thin films

G. N. Pain, T. Warminski, S. Sulcs, M. S. Kwietniak, D. Gao, S. R. Glanvill, C. J. Rossouw, Andrew W Stevenson, S. P. Russo, R. G. Elliman, L. S. Wielunski, R. S. Rowe, G. B. Deacon, R. S. Dickson, B. O. West

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Abstract

New organomanganese sources RMn(CO)5 (e.g. R = CH3 or C6H5CH2) have enabled low-temperature MOCVD of Cd1-xMnxTe (0 <x <0.8) thin films on GaAs, GaAs Si, InP, sapphire and glass substrates over an area > 50 cm2 in a horizontal reactor at atmospheric pressure. Diluted magnetic Cd1-yMnyTe Cd1-xMnxTe strained layer superlattices have been characterized by SIMS, PIXE, RBS, HRTEM of ultramicrotomed cross-sectional samples, double-crystal XRD rocking curve and satellite analysis and simulation, X-ray topography, WDX/EPMA, optical transmission and FTIR. Local thickness mapping by simultaneous PIXE and RBS, profilometry, SIMS sputter times and FTIR has provided uniformity information required for improved reactor design. Preferential (011) growth on (100) GaAs leads to anisotropic micrograting-like X-ray diffraction at glancing angles. Smoother materials is obtained on (111B), (311A), (311B), and (100) 2° off toward (110) GaAs. 

Original languageEnglish
Pages (from-to)76-88
Number of pages13
JournalApplied Surface Science
Volume48-49
DOIs
Publication statusPublished - 1991

Cite this

Pain, G. N., Warminski, T., Sulcs, S., Kwietniak, M. S., Gao, D., Glanvill, S. R., ... West, B. O. (1991). Characterization of low-temperature MOCVD Cd1-xMnxTe thin films. Applied Surface Science, 48-49, 76-88. https://doi.org/10.1016/0169-4332(91)90310-G
Pain, G. N. ; Warminski, T. ; Sulcs, S. ; Kwietniak, M. S. ; Gao, D. ; Glanvill, S. R. ; Rossouw, C. J. ; Stevenson, Andrew W ; Russo, S. P. ; Elliman, R. G. ; Wielunski, L. S. ; Rowe, R. S. ; Deacon, G. B. ; Dickson, R. S. ; West, B. O. / Characterization of low-temperature MOCVD Cd1-xMnxTe thin films. In: Applied Surface Science. 1991 ; Vol. 48-49. pp. 76-88.
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abstract = "New organomanganese sources RMn(CO)5 (e.g. R = CH3 or C6H5CH2) have enabled low-temperature MOCVD of Cd1-xMnxTe (0 50 cm2 in a horizontal reactor at atmospheric pressure. Diluted magnetic Cd1-yMnyTe Cd1-xMnxTe strained layer superlattices have been characterized by SIMS, PIXE, RBS, HRTEM of ultramicrotomed cross-sectional samples, double-crystal XRD rocking curve and satellite analysis and simulation, X-ray topography, WDX/EPMA, optical transmission and FTIR. Local thickness mapping by simultaneous PIXE and RBS, profilometry, SIMS sputter times and FTIR has provided uniformity information required for improved reactor design. Preferential (011) growth on (100) GaAs leads to anisotropic micrograting-like X-ray diffraction at glancing angles. Smoother materials is obtained on (111B), (311A), (311B), and (100) 2° off toward (110) GaAs. ",
author = "Pain, {G. N.} and T. Warminski and S. Sulcs and Kwietniak, {M. S.} and D. Gao and Glanvill, {S. R.} and Rossouw, {C. J.} and Stevenson, {Andrew W} and Russo, {S. P.} and Elliman, {R. G.} and Wielunski, {L. S.} and Rowe, {R. S.} and Deacon, {G. B.} and Dickson, {R. S.} and West, {B. O.}",
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Pain, GN, Warminski, T, Sulcs, S, Kwietniak, MS, Gao, D, Glanvill, SR, Rossouw, CJ, Stevenson, AW, Russo, SP, Elliman, RG, Wielunski, LS, Rowe, RS, Deacon, GB, Dickson, RS & West, BO 1991, 'Characterization of low-temperature MOCVD Cd1-xMnxTe thin films', Applied Surface Science, vol. 48-49, pp. 76-88. https://doi.org/10.1016/0169-4332(91)90310-G

Characterization of low-temperature MOCVD Cd1-xMnxTe thin films. / Pain, G. N.; Warminski, T.; Sulcs, S.; Kwietniak, M. S.; Gao, D.; Glanvill, S. R.; Rossouw, C. J.; Stevenson, Andrew W; Russo, S. P.; Elliman, R. G.; Wielunski, L. S.; Rowe, R. S.; Deacon, G. B.; Dickson, R. S.; West, B. O.

In: Applied Surface Science, Vol. 48-49, 1991, p. 76-88.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Characterization of low-temperature MOCVD Cd1-xMnxTe thin films

AU - Pain, G. N.

AU - Warminski, T.

AU - Sulcs, S.

AU - Kwietniak, M. S.

AU - Gao, D.

AU - Glanvill, S. R.

AU - Rossouw, C. J.

AU - Stevenson, Andrew W

AU - Russo, S. P.

AU - Elliman, R. G.

AU - Wielunski, L. S.

AU - Rowe, R. S.

AU - Deacon, G. B.

AU - Dickson, R. S.

AU - West, B. O.

PY - 1991

Y1 - 1991

N2 - New organomanganese sources RMn(CO)5 (e.g. R = CH3 or C6H5CH2) have enabled low-temperature MOCVD of Cd1-xMnxTe (0 50 cm2 in a horizontal reactor at atmospheric pressure. Diluted magnetic Cd1-yMnyTe Cd1-xMnxTe strained layer superlattices have been characterized by SIMS, PIXE, RBS, HRTEM of ultramicrotomed cross-sectional samples, double-crystal XRD rocking curve and satellite analysis and simulation, X-ray topography, WDX/EPMA, optical transmission and FTIR. Local thickness mapping by simultaneous PIXE and RBS, profilometry, SIMS sputter times and FTIR has provided uniformity information required for improved reactor design. Preferential (011) growth on (100) GaAs leads to anisotropic micrograting-like X-ray diffraction at glancing angles. Smoother materials is obtained on (111B), (311A), (311B), and (100) 2° off toward (110) GaAs. 

AB - New organomanganese sources RMn(CO)5 (e.g. R = CH3 or C6H5CH2) have enabled low-temperature MOCVD of Cd1-xMnxTe (0 50 cm2 in a horizontal reactor at atmospheric pressure. Diluted magnetic Cd1-yMnyTe Cd1-xMnxTe strained layer superlattices have been characterized by SIMS, PIXE, RBS, HRTEM of ultramicrotomed cross-sectional samples, double-crystal XRD rocking curve and satellite analysis and simulation, X-ray topography, WDX/EPMA, optical transmission and FTIR. Local thickness mapping by simultaneous PIXE and RBS, profilometry, SIMS sputter times and FTIR has provided uniformity information required for improved reactor design. Preferential (011) growth on (100) GaAs leads to anisotropic micrograting-like X-ray diffraction at glancing angles. Smoother materials is obtained on (111B), (311A), (311B), and (100) 2° off toward (110) GaAs. 

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U2 - 10.1016/0169-4332(91)90310-G

DO - 10.1016/0169-4332(91)90310-G

M3 - Article

VL - 48-49

SP - 76

EP - 88

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -

Pain GN, Warminski T, Sulcs S, Kwietniak MS, Gao D, Glanvill SR et al. Characterization of low-temperature MOCVD Cd1-xMnxTe thin films. Applied Surface Science. 1991;48-49:76-88. https://doi.org/10.1016/0169-4332(91)90310-G