The availability of new organomanganese feedstocks RMn(CO)5 (R = CH3 [methyl] or C6H5CH2 [benzyl]) has enabled growth of diluted magnetic semiconductor superlattices Cd1-xMnxTe/Cd1-yTe by low temperature metal organic chemical vapour deposition (MOCVD) for the first time. Secondary ion mass spectrometry (SIMS) was used to measure composition modulation and there was no evidence for carbon contamination from the new sources. X-ray topography, double crystal X-ray diffraction and Nomarski interference microscopy showed preferential facetting and different mosaic spread for some substrate orientations. Particle-induced X-ray emission (PIXE), Rutherford backscattering spectroscopy (RBS), high resolution transmission electron microscopy (HRTEM), and analytical electron microscopy (AEM) were used to evaluate material composition and quality.
|Number of pages||9|
|Publication status||Published - 1 Jan 1991|