Cantilever-based poly(dimethylsiloxane) microoptoelectromechanical systems

Victor Javier Cadarso, Sandra De Pedro, Jose Antonio Plaza, Stephanus Büttgenbach, Kirill Zinoviev, Andreu Llobera, Carlos Dominguez Contreras

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

2 Citations (Scopus)

Abstract

Poly(dimethylsiloxane) (PDMS) has been considered for the first time for defining cantilever-based Microopto-electromechanical Systems (MOEMS) by ways of soft lithography. The systems shown have a high degree of integration, comprising cantilever-waveguides, lenses, self alignment systems and seismic mass. The very low Young's modulus allows defining thick PDMS-MOEMS for mechanical sensors with sensitivities similar to its nanometer scale silicon counterparts. Experimental resonant frequencies of the proposed MOEMS are in agreement with the numerical simulations done, with Q factors in agreement with the PDMS properties. Finally, when a 1.58 mg droplet of ethanol is dispensed on the cantilever, there is a bending of the cantilever, causing an increase of the relative losses until 25 dB, returning to its initial value when the droplet evaporates.

Original languageEnglish
Title of host publicationIEEE Sensors 2009 Conference - SENSORS 2009
Pages413-417
Number of pages5
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventIEEE Conference on Sensors 2009 - Christchurch New Zealand, Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009

Conference

ConferenceIEEE Conference on Sensors 2009
Abbreviated titleSENSORS 2009
CountryNew Zealand
CityChristchurch
Period25/10/0928/10/09

Cite this

Cadarso, V. J., De Pedro, S., Plaza, J. A., Büttgenbach, S., Zinoviev, K., Llobera, A., & Dominguez Contreras, C. (2009). Cantilever-based poly(dimethylsiloxane) microoptoelectromechanical systems. In IEEE Sensors 2009 Conference - SENSORS 2009 (pp. 413-417). [5398254] https://doi.org/10.1109/ICSENS.2009.5398254