Calculation and measurement of the Mueller matrix for an elliptical mirror

O. G. Rodríguez-Herrera, N. C. Bruce, M. Rosete-Aguilar

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

2 Citations (Scopus)

Abstract

We have recently developed a scatterometer for bi-dimensional rough surfaces which uses an elliptical mirror to direct the light toward the rough surface and to collect the scattered light and direct it to a CCD camera. This device has advantages over similar previous devices such as the time needed for measurement and operation range. We have calculated and measured the Mueller matrix of the elliptical mirror and we have compared them to test the validity of our method. Preliminary results show differences between theory and experiment that must be explained.

Original languageEnglish
Title of host publicationEighth International Symposium on Laser Metrology
PublisherSPIE
Pages189-197
Number of pages9
Volume5776
DOIs
Publication statusPublished - 2005
Externally publishedYes
Event8th International Symposium on Laser Metrology - Merida, Yucatan, Mexico
Duration: 14 Feb 200518 Feb 2005
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5776.toc (Proceedings)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
ISSN (Print)0277-786X

Conference

Conference8th International Symposium on Laser Metrology
Country/TerritoryMexico
CityMerida, Yucatan
Period14/02/0518/02/05
Internet address

Keywords

  • Ellipsometry
  • Elliptical mirror
  • Mueller matrix
  • Scatterometer

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