Abstract
We have recently developed a scatterometer for bi-dimensional rough surfaces which uses an elliptical mirror to direct the light toward the rough surface and to collect the scattered light and direct it to a CCD camera. This device has advantages over similar previous devices such as the time needed for measurement and operation range. We have calculated and measured the Mueller matrix of the elliptical mirror and we have compared them to test the validity of our method. Preliminary results show differences between theory and experiment that must be explained.
| Original language | English |
|---|---|
| Title of host publication | Eighth International Symposium on Laser Metrology |
| Publisher | SPIE - International Society for Optical Engineering |
| Pages | 189-197 |
| Number of pages | 9 |
| Volume | 5776 |
| DOIs | |
| Publication status | Published - 2005 |
| Externally published | Yes |
| Event | 8th International Symposium on Laser Metrology - Merida, Yucatan, Mexico Duration: 14 Feb 2005 → 18 Feb 2005 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5776.toc (Proceedings) |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| ISSN (Print) | 0277-786X |
Conference
| Conference | 8th International Symposium on Laser Metrology |
|---|---|
| Country/Territory | Mexico |
| City | Merida, Yucatan |
| Period | 14/02/05 → 18/02/05 |
| Internet address |
Keywords
- Ellipsometry
- Elliptical mirror
- Mueller matrix
- Scatterometer