Calculation and measurement of the Mueller matrix for an elliptical mirror

O. G. Rodríguez-Herrera, N. C. Bruce, M. Rosete-Aguilar

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

2 Citations (Scopus)


We have recently developed a scatterometer for bi-dimensional rough surfaces which uses an elliptical mirror to direct the light toward the rough surface and to collect the scattered light and direct it to a CCD camera. This device has advantages over similar previous devices such as the time needed for measurement and operation range. We have calculated and measured the Mueller matrix of the elliptical mirror and we have compared them to test the validity of our method. Preliminary results show differences between theory and experiment that must be explained.

Original languageEnglish
Title of host publicationEighth International Symposium on Laser Metrology
PublisherSPIE - International Society for Optical Engineering
Number of pages9
Publication statusPublished - 2005
Externally publishedYes
Event8th International Symposium on Laser Metrology - Merida, Yucatan, Mexico
Duration: 14 Feb 200518 Feb 2005 (Proceedings)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


Conference8th International Symposium on Laser Metrology
CityMerida, Yucatan
Internet address


  • Ellipsometry
  • Elliptical mirror
  • Mueller matrix
  • Scatterometer

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