Calculating x-ray diffraction from multilayer lateral crystal structures with arbitrary shapes and composition profiles

Vasily I Punegov; A I Maksimov; Sergey I Kolosov; Konstantin Mikhailovitch Pavlov

Calculating x-ray diffraction from multilayer lateral crystal structures with arbitrary shapes and composition profiles

Vasily I Punegov, A I Maksimov, Sergey I Kolosov, Konstantin Mikhailovitch Pavlov

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Abstract

A theory of x-ray diffraction in the vertical direction from a lateral crystal having an arbitrary shape and arbitrary depth-composition profile has been developed within the framework of the kinematic approximation. The results of a numerical simulation of diffraction patterns from such crystals in high-resolution triple-axis diffractometry scheme are presented.

Original language	English
Pages (from-to)	125 - 127
Number of pages	3
Journal	Technical Physics Letters
Volume	33
Issue number	2
Publication status	Published - 2007

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title = "Calculating x-ray diffraction from multilayer lateral crystal structures with arbitrary shapes and composition profiles",

abstract = "A theory of x-ray diffraction in the vertical direction from a lateral crystal having an arbitrary shape and arbitrary depth-composition profile has been developed within the framework of the kinematic approximation. The results of a numerical simulation of diffraction patterns from such crystals in high-resolution triple-axis diffractometry scheme are presented.",

author = "Punegov, {Vasily I} and Maksimov, {A I} and Kolosov, {Sergey I} and Pavlov, {Konstantin Mikhailovitch}",

year = "2007",

language = "English",

volume = "33",

pages = "125 -- 127",

journal = "Technical Physics Letters",

issn = "1063-7850",

publisher = "M A I K Nauka - Interperiodica",

number = "2",

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T1 - Calculating x-ray diffraction from multilayer lateral crystal structures with arbitrary shapes and composition profiles

AU - Punegov, Vasily I

AU - Maksimov, A I

AU - Kolosov, Sergey I

AU - Pavlov, Konstantin Mikhailovitch

PY - 2007

Y1 - 2007

N2 - A theory of x-ray diffraction in the vertical direction from a lateral crystal having an arbitrary shape and arbitrary depth-composition profile has been developed within the framework of the kinematic approximation. The results of a numerical simulation of diffraction patterns from such crystals in high-resolution triple-axis diffractometry scheme are presented.

AB - A theory of x-ray diffraction in the vertical direction from a lateral crystal having an arbitrary shape and arbitrary depth-composition profile has been developed within the framework of the kinematic approximation. The results of a numerical simulation of diffraction patterns from such crystals in high-resolution triple-axis diffractometry scheme are presented.

UR - http://<Go to ISI>://000244850200010

M3 - Article

VL - 33

SP - 125

EP - 127

JO - Technical Physics Letters

JF - Technical Physics Letters

SN - 1063-7850

IS - 2

ER -