Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

K Biswas, S Das, Devendra Kumar Maurya, S Kal, S K Lahiri

Research output: Contribution to journalArticleResearchpeer-review

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)321 - 327
Number of pages7
JournalMicroelectronics
Volume37
Issue number4
Publication statusPublished - 2006
Externally publishedYes

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