Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

K Biswas, S Das, Devendra Kumar Maurya, S Kal, S K Lahiri

Research output: Contribution to journal › Article › Research › peer-review

Cite this

@article{6f4debff7f0a42a6a19ed2ff5a91b235,

title = "Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface",

author = "K Biswas and S Das and Maurya, {Devendra Kumar} and S Kal and Lahiri, {S K}",

year = "2006",

language = "English",

volume = "37",

pages = "321 -- 327",

journal = "Microelectronics Journal",

issn = "0026-2692",

publisher = "Elsevier",

number = "4",

}