Bottom-up, chip-scale engineering of low threshold, multi-quantum-well microring lasers

Wei Wen Wong, Naiyin Wang, Bryan D. Esser, Stephen A. Church, Li Li, Mark Lockrey, Igor Aharonovich, Patrick Parkinson, Joanne Etheridge, Chennupati Jagadish, Hark Hoe Tan

Research output: Contribution to journalArticleResearchpeer-review


Integrated, on-chip lasers are vital building blocks in future optoelectronic and nanophotonic circuitry. Specifically, III-V materials that are of technological relevance have attracted considerable attention. However, traditional microcavity laser fabrication techniques, including top-down etching and bottom-up catalytic growth, often result in undesirable cavity geometries with poor scalability and reproducibility. Here, we utilize the selective area epitaxy method to deterministically engineer thousands of microring lasers on a single chip. Specifically, we realize a catalyst-free, epitaxial growth of a technologically critical material, InAsP/InP, in a ring-like cavity with embedded multi-quantum-well heterostructures. We elucidate a detailed growth mechanism and leverage the capability to deterministically control the adatom diffusion lengths on selected crystal facets to reproducibly achieve ultrasmooth cavity sidewalls. The engineered devices exhibit a tunable emission wavelength in the telecommunication O-band and show low-threshold lasing with over 80% device efficacy across the chip. Our work marks a significant milestone toward the implementation of a fully integrated III-V materials platform for next-generation high-density integrated photonic and optoelectronic circuits.

Original languageEnglish
Pages (from-to)15065-15076
Number of pages12
JournalACS Nano
Publication statusPublished - 2023


  • III−V microring lasers
  • III−V quantum well lasers
  • integrated photonics
  • selective area epitaxy
  • whispering-gallery mode lasers

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