Beam-induced damage on diffractive hard X-ray optics

K. Nygård, S. Gorelick, J. Vila-Comamala, E. Färm, A. Bergamaschi, A. Cervellino, F. Gozzo, B. D. Patterson, M. Ritala, C. David

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The issue of beam-induced damage on diffractive hard X-ray optics is addressed. For this purpose a systematic study on the radiation damage induced by a high-power X-ray beam is carried out in both ambient and inert atmospheres. Diffraction gratings fabricated by three different techniques are considered: electroplated Au gratings both with and without the polymer mold, and Ir-coated Si gratings. The beam-induced damage is monitored by X-ray diffraction and evaluated using scanning electron microscopy.

Original languageEnglish
Pages (from-to)786-790
Number of pages5
JournalJournal of Synchrotron Radiation
Issue number6
Publication statusPublished - 1 Nov 2010
Externally publishedYes


  • diffractive X-ray optics
  • radiation damage

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