Automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi; Kwang Joo Sim; Ye Chow Kuang; Lindsay Kleeman; Chris Chan; Serge Demidenko

doi:10.1109/IMTC.2010.5488012

Automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi
, Kwang Joo Sim
, Ye Chow Kuang
, Lindsay Kleeman
, Chris Chan
, Serge Demidenko

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)
Editors	Vincenzo Piuri
Place of Publication	NJ USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	1024 - 1029
Number of pages	6
ISBN (Print)	9781424428335
DOIs	https://doi.org/10.1109/IMTC.2010.5488012
Publication status	Published - 2010
Event	IEEE International Instrumentation and Measurement Technology Conference 2010 - Austin, United States of America Duration: 3 May 2010 → 6 May 2010 Conference number: 27th https://ieeexplore.ieee.org/xpl/conhome/5480448/proceeding (Proceedings)

Conference

Conference	IEEE International Instrumentation and Measurement Technology Conference 2010
Abbreviated title	I2MTC 2010
Country/Territory	United States of America
City	Austin
Period	3/05/10 → 6/05/10
Internet address	https://ieeexplore.ieee.org/xpl/conhome/5480448/proceeding (Proceedings)

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10.1109/IMTC.2010.5488012

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Ooi, P.-L., Sim, K. J., Kuang, Y. C., Kleeman, L., Chan, C., & Demidenko, S. (2010). Automatic defect cluster extraction for semiconductor wafers. In V. Piuri (Ed.), Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010) (pp. 1024 - 1029). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/IMTC.2010.5488012

@inproceedings{d9e4d42d984a43e38faceed90b001dd4,

title = "Automatic defect cluster extraction for semiconductor wafers",

author = "Po-Leen Ooi and Sim, \{Kwang Joo\} and Kuang, \{Ye Chow\} and Lindsay Kleeman and Chris Chan and Serge Demidenko",

year = "2010",

doi = "10.1109/IMTC.2010.5488012",

language = "English",

isbn = "9781424428335",

pages = "1024 -- 1029",

editor = "Vincenzo Piuri",

booktitle = "Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Instrumentation and Measurement Technology Conference 2010, I2MTC 2010 ; Conference date: 03-05-2010 Through 06-05-2010",

url = "https://ieeexplore.ieee.org/xpl/conhome/5480448/proceeding",

}

Ooi, P-L, Sim, KJ, Kuang, YC, Kleeman, L, Chan, C & Demidenko, S 2010, Automatic defect cluster extraction for semiconductor wafers. in V Piuri (ed.), Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). IEEE, Institute of Electrical and Electronics Engineers, NJ USA, pp. 1024 - 1029, IEEE International Instrumentation and Measurement Technology Conference 2010, Austin, Texas, United States of America, 3/05/10. https://doi.org/10.1109/IMTC.2010.5488012

Automatic defect cluster extraction for semiconductor wafers. / Ooi, Po-Leen; Sim, Kwang Joo; Kuang, Ye Chow et al.
Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). ed. / Vincenzo Piuri. NJ USA: IEEE, Institute of Electrical and Electronics Engineers, 2010. p. 1024 - 1029.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Automatic defect cluster extraction for semiconductor wafers

AU - Ooi, Po-Leen

AU - Sim, Kwang Joo

AU - Kuang, Ye Chow

AU - Kleeman, Lindsay

AU - Chan, Chris

AU - Demidenko, Serge

N1 - Conference code: 27th

PY - 2010

Y1 - 2010

UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5488012

U2 - 10.1109/IMTC.2010.5488012

DO - 10.1109/IMTC.2010.5488012

M3 - Conference Paper

SN - 9781424428335

SP - 1024

EP - 1029

BT - Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)

A2 - Piuri, Vincenzo

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - NJ USA

T2 - IEEE International Instrumentation and Measurement Technology Conference 2010

Y2 - 3 May 2010 through 6 May 2010

ER -

Automatic defect cluster extraction for semiconductor wafers

Conference

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