Automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi; Kwang Joo Sim; Ye Chow Kuang; Lindsay Kleeman; Chris Chan; Serge Demidenko

doi:10.1109/IMTC.2010.5488012

Automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi, Kwang Joo Sim, Ye Chow Kuang, Lindsay Kleeman, Chris Chan, Serge Demidenko

Electrical and Computer Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

12 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)
Editors	Vincenzo Piuri
Place of Publication	NJ USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	1024 - 1029
Number of pages	6
ISBN (Print)	9781424428335
DOIs	https://doi.org/10.1109/IMTC.2010.5488012
Publication status	Published - 2010
Event	IEEE International Instrumentation and Measurement Technology Conference 2010 - TX USA, NJ USA Duration: 1 Jan 2010 → …

Conference

Conference	IEEE International Instrumentation and Measurement Technology Conference 2010
Abbreviated title	I2MTC 2010
City	NJ USA
Period	1/01/10 → …

Access to Document

10.1109/IMTC.2010.5488012

RM sElocation

Cite this

Ooi, P-L., Sim, K. J., Kuang, Y. C., Kleeman, L., Chan, C., & Demidenko, S. (2010). Automatic defect cluster extraction for semiconductor wafers. In V. Piuri (Ed.), Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010) (pp. 1024 - 1029). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/IMTC.2010.5488012

Ooi, Po-Leen ; Sim, Kwang Joo ; Kuang, Ye Chow ; Kleeman, Lindsay ; Chan, Chris ; Demidenko, Serge. / Automatic defect cluster extraction for semiconductor wafers. Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). editor / Vincenzo Piuri. NJ USA : IEEE, Institute of Electrical and Electronics Engineers, 2010. pp. 1024 - 1029

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title = "Automatic defect cluster extraction for semiconductor wafers",

author = "Po-Leen Ooi and Sim, {Kwang Joo} and Kuang, {Ye Chow} and Lindsay Kleeman and Chris Chan and Serge Demidenko",

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doi = "10.1109/IMTC.2010.5488012",

language = "English",

isbn = "9781424428335",

pages = "1024 -- 1029",

editor = "Vincenzo Piuri",

booktitle = "Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Instrumentation and Measurement Technology Conference 2010, I2MTC 2010 ; Conference date: 01-01-2010",

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Ooi, P-L, Sim, KJ, Kuang, YC, Kleeman, L, Chan, C & Demidenko, S 2010, Automatic defect cluster extraction for semiconductor wafers. in V Piuri (ed.), Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). IEEE, Institute of Electrical and Electronics Engineers, NJ USA, pp. 1024 - 1029, IEEE International Instrumentation and Measurement Technology Conference 2010, NJ USA, 1/01/10. https://doi.org/10.1109/IMTC.2010.5488012

Automatic defect cluster extraction for semiconductor wafers. / Ooi, Po-Leen; Sim, Kwang Joo; Kuang, Ye Chow; Kleeman, Lindsay; Chan, Chris; Demidenko, Serge.

Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). ed. / Vincenzo Piuri. NJ USA : IEEE, Institute of Electrical and Electronics Engineers, 2010. p. 1024 - 1029.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Automatic defect cluster extraction for semiconductor wafers

AU - Ooi, Po-Leen

AU - Sim, Kwang Joo

AU - Kuang, Ye Chow

AU - Kleeman, Lindsay

AU - Chan, Chris

AU - Demidenko, Serge

PY - 2010

Y1 - 2010

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DO - 10.1109/IMTC.2010.5488012

M3 - Conference Paper

SN - 9781424428335

SP - 1024

EP - 1029

BT - Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)

A2 - Piuri, Vincenzo

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - NJ USA

T2 - IEEE International Instrumentation and Measurement Technology Conference 2010

Y2 - 1 January 2010

ER -

Ooi P-L, Sim KJ, Kuang YC, Kleeman L, Chan C, Demidenko S. Automatic defect cluster extraction for semiconductor wafers. In Piuri V, editor, Proceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010). NJ USA: IEEE, Institute of Electrical and Electronics Engineers. 2010. p. 1024 - 1029 https://doi.org/10.1109/IMTC.2010.5488012