Automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi, Kwang Joo Sim, Ye Chow Kuang, Lindsay Kleeman, Chris Chan, Serge Demidenko

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

12 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 2010 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2010)
EditorsVincenzo Piuri
Place of PublicationNJ USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages1024 - 1029
Number of pages6
ISBN (Print)9781424428335
DOIs
Publication statusPublished - 2010
EventIEEE International Instrumentation and Measurement Technology Conference 2010 - TX USA, NJ USA
Duration: 1 Jan 2010 → …

Conference

ConferenceIEEE International Instrumentation and Measurement Technology Conference 2010
Abbreviated titleI2MTC 2010
CityNJ USA
Period1/01/10 → …

Cite this