An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

D Koyama, Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	597 - 604
Number of pages	8
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume	54
Issue number	3
Publication status	Published - 2007

Cite this

@article{a3cea4a4e8984694a2da1c6811905710,

title = "An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails",

author = "D Koyama and Takeshi Ide and James Friend and Kentaro Nakamura and Sadayuki Ueha",

year = "2007",

language = "English",

volume = "54",

pages = "597 -- 604",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control",

issn = "0885-3010",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

number = "3",

}

TY - JOUR

T1 - An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

AU - Koyama, D

AU - Ide, Takeshi

AU - Friend, James

AU - Nakamura, Kentaro

AU - Ueha, Sadayuki

PY - 2007

Y1 - 2007

M3 - Article

VL - 54

SP - 597

EP - 604

JO - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

SN - 0885-3010

IS - 3

ER -