An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

D Koyama, Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journalArticleResearchpeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)597 - 604
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Issue number3
Publication statusPublished - 2007

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