An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

D Koyama, Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journalArticleResearchpeer-review

24 Citations (Scopus)
Original languageEnglish
Pages (from-to)597 - 604
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume54
Issue number3
Publication statusPublished - 2007

Cite this