An integrated magnetic programming technique for mechanical microresonators

Ali Mohammadi, Bhaskar Choubey, Mehmet R. Yuce, Nemai C. Karmakar

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearch

Abstract

Mechanical memory devices are needed for harsh environments where electronic components fail to operate. An integrated electro-Thermal technique for local magnetic annealing, which enables post-production programming capabilities for mechanical micro-resonators is presented. It is verified by a prototype with ferromagnetic resonating elements suspended on top of a polysilicon resistive heater. The magnetization (M-H) loop, with and without post-fabrication annealing are measured to prove the validity of technique.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
EditorsZhidong Wang
Place of PublicationPiscataway NJ USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages485-488
Number of pages4
ISBN (Electronic)9781509030590
ISBN (Print)9781509030590
DOIs
Publication statusPublished - 25 Aug 2017
EventIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2017 - UCLA Luskin Conference Center, Los Angeles, United States of America
Duration: 9 Apr 201712 Apr 2017
Conference number: 12th
https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=41383

Conference

ConferenceIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2017
Abbreviated titleNEMS 2017
CountryUnited States of America
CityLos Angeles
Period9/04/1712/04/17
Internet address

Cite this

Mohammadi, A., Choubey, B., Yuce, M. R., & Karmakar, N. C. (2017). An integrated magnetic programming technique for mechanical microresonators. In Z. Wang (Ed.), 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 485-488). [8017069] IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/NEMS.2017.8017069