Original language | English |
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Title of host publication | Micro Electro Mechanical Systems (MEMS) 2011 IEEE 24th International Conference |
Editors | Karl Bohringer, Liwei Lin |
Place of Publication | New York NY USA |
Publisher | IEEE, Institute of Electrical and Electronics Engineers |
Pages | 1103 - 1106 |
Number of pages | 4 |
ISBN (Print) | 9781424496327 |
DOIs | |
Publication status | Published - 2011 |
Externally published | Yes |
Event | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24th https://ieeexplore.ieee.org/xpl/conhome/5724748/proceeding (Proceedings) |
Conference
Conference | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2011 |
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Abbreviated title | MEMS 2011 |
Country/Territory | Mexico |
City | Cancun |
Period | 23/01/11 → 27/01/11 |
Internet address |