All-polymer optothermal-actuated MOEMS variable optical attenuator

A. Llobera, B. Hoxhold, Stefanie Demming, Anja Voigt, Sandra De Pedro, A. Waldschik, V. J. Cadarso, G. Gruetzner, S. Buttgenbach

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

1 Citation (Scopus)

Abstract

This paper presents the design, fabrication and characterization of all-optical polymer-based Micro-optoelectromechanical system (MOEMS) Variable Optical Attenuator (VOA). It consists of an SU-8 quad-beam structure and a suspended waveguide aligned to input/output fiber optics. Actuation is achieved by defining dye-doped SU-8 structures on the mechanical beams. Specific wavelengths focused on such structures have a strong absorption resulting in a heating and, straightforwardly, an expansion of the dye-doped SU-8. This entails a displacement of the seismic mass causing a misalignment (i.e. an increase of the coupling losses) between the waveguides and the input/output fiber optics. Experimental results have validated this approach, by showing the effect of the pumping power on the optical losses, with a slope of 0.17 dB/mW.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages1432-1435
Number of pages4
ISBN (Print)9781467359818
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventInternational Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors 2013) - Centro de Convenciones Internacional de Barcelona (CCIB), Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
Conference number: 17th
https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=30951

Conference

ConferenceInternational Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors 2013)
Abbreviated titleTRANSDUCERS and EUROSENSORS XXVII
CountrySpain
CityBarcelona
Period16/06/1320/06/13
Internet address

Keywords

  • dye-doped
  • optothermal actuation
  • relative optical losses
  • SU-8
  • VOA

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