Air damping of oscillating MEMS structures: Modeling and comparison with experiment

Sergey Gorelick, James R. Dekker, Mikko Leivo, Uula Kantojarvi

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Abstract

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, in-plane and out-of-plane tuning forks, and a torsional mirror. A simplified 2D model of the damping per unit length of the structures and as a function of initial displacement was developed. Experimentally measured Q-values of selected systems were compared with simulated results with 2-30% agreement validating the applicability of the simplified 2D model.
Original languageEnglish
Title of host publicationProceedings of 2013 COMSOL Conference in Rotterdam
EditorsH. Cabrera, D.A. Zanin, Lorenzo G. De Pietro, A. Vindigni, U. Ramsperger, D. Pescia
PublisherCOMSOL
Number of pages6
Publication statusPublished - 2013
Externally publishedYes
EventCOMSOL Conference 2013 - Rotterdam, Netherlands
Duration: 23 Oct 201325 Oct 2013

Conference

ConferenceCOMSOL Conference 2013
CountryNetherlands
CityRotterdam
Period23/10/1325/10/13

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