Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics

Melanie Ooi; Ye Chow Kuang; Wey Jean Tee; Ajay Achath Mohanan; Chris Chan

Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics

Melanie Ooi, Ye Chow Kuang, Wey Jean Tee, Ajay Achath Mohanan, Chris Chan

Malaysia School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009)
Editors	Paul Wesling
Place of Publication	New Jersey USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	225 - 232
Number of pages	8
Volume	1
ISBN (Print)	9781424449521
Publication status	Published - 2009
Event	Asia Symposium on Quality Electronic Design (ASQED) 2009 - Kuala Lumpur Malaysia, New Jersey USA Duration: 1 Jan 2009 → …

Conference

Conference	Asia Symposium on Quality Electronic Design (ASQED) 2009
City	New Jersey USA
Period	1/01/09 → …

Cite this

Ooi, M., Kuang, Y. C., Tee, W. J., Achath Mohanan, A., & Chan, C. (2009). Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics. In P. Wesling (Ed.), Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009) (Vol. 1, pp. 225 - 232). IEEE, Institute of Electrical and Electronics Engineers.

Ooi, Melanie ; Kuang, Ye Chow ; Tee, Wey Jean et al. / Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics. Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009). editor / Paul Wesling. Vol. 1 New Jersey USA : IEEE, Institute of Electrical and Electronics Engineers, 2009. pp. 225 - 232

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title = "Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics",

author = "Melanie Ooi and Kuang, {Ye Chow} and Tee, {Wey Jean} and {Achath Mohanan}, Ajay and Chris Chan",

year = "2009",

language = "English",

isbn = "9781424449521",

volume = "1",

pages = "225 -- 232",

editor = "Paul Wesling",

booktitle = "Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "Asia Symposium on Quality Electronic Design (ASQED) 2009 ; Conference date: 01-01-2009",

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Ooi, M, Kuang, YC, Tee, WJ, Achath Mohanan, A & Chan, C 2009, Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics. in P Wesling (ed.), Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009). vol. 1, IEEE, Institute of Electrical and Electronics Engineers, New Jersey USA, pp. 225 - 232, Asia Symposium on Quality Electronic Design (ASQED) 2009, New Jersey USA, 1/01/09.

Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics. / Ooi, Melanie; Kuang, Ye Chow; Tee, Wey Jean et al.
Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009). ed. / Paul Wesling. Vol. 1 New Jersey USA: IEEE, Institute of Electrical and Electronics Engineers, 2009. p. 225 - 232.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

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T1 - Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics

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AU - Kuang, Ye Chow

AU - Tee, Wey Jean

AU - Achath Mohanan, Ajay

AU - Chan, Chris

PY - 2009

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M3 - Conference Paper

SN - 9781424449521

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BT - Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009)

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PB - IEEE, Institute of Electrical and Electronics Engineers

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T2 - Asia Symposium on Quality Electronic Design (ASQED) 2009

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Ooi M, Kuang YC, Tee WJ, Achath Mohanan A, Chan C. Accurate defect cluster detection and localisation on fabricated semiconductor wafers using joint count statistics. In Wesling P, editor, Proceedings of the First Asia Symposium on Quality Electronic Design (ASQED 2009). Vol. 1. New Jersey USA: IEEE, Institute of Electrical and Electronics Engineers. 2009. p. 225 - 232