Accuracy and precision of thickness determination from position-averaged convergent beam electron diffraction patterns using a single-parameter metric

J A Pollock, M Weyland, D J Taplin, L J Allen, S D Findlay

Research output: Contribution to journalArticleResearchpeer-review

1 Citation (Scopus)

Abstract

Position-averaged convergent beam electron diffraction patterns are formed by averaging the transmission diffraction pattern while scanning an atomically-fine electron probe across a sample. Visual comparison between experimental and simulated patterns is increasingly being used for sample thickness determination. We explore automating the comparison via a simple sum square difference metric. The thickness determination is shown to be accurate (i.e. the best-guess deduced thickness generally concurs with the true thickness), though factors such as noise, mistilt and inelastic scattering reduce the precision (i.e. increase the uncertainty range). Notably, the precision tends to be higher for smaller probe-forming aperture angles.

Original languageEnglish
Pages (from-to)86-96
Number of pages11
JournalUltramicroscopy
Volume181
DOIs
Publication statusPublished - 1 Oct 2017

Keywords

  • Position averaged convergent beam electron diffraction (PACBED)
  • Scanning transmission electron microscopy (STEM)
  • Thickness measurement

Cite this

@article{90b2db0760f747899f49a48f93893517,
title = "Accuracy and precision of thickness determination from position-averaged convergent beam electron diffraction patterns using a single-parameter metric",
abstract = "Position-averaged convergent beam electron diffraction patterns are formed by averaging the transmission diffraction pattern while scanning an atomically-fine electron probe across a sample. Visual comparison between experimental and simulated patterns is increasingly being used for sample thickness determination. We explore automating the comparison via a simple sum square difference metric. The thickness determination is shown to be accurate (i.e. the best-guess deduced thickness generally concurs with the true thickness), though factors such as noise, mistilt and inelastic scattering reduce the precision (i.e. increase the uncertainty range). Notably, the precision tends to be higher for smaller probe-forming aperture angles.",
keywords = "Position averaged convergent beam electron diffraction (PACBED), Scanning transmission electron microscopy (STEM), Thickness measurement",
author = "Pollock, {J A} and M Weyland and Taplin, {D J} and Allen, {L J} and Findlay, {S D}",
year = "2017",
month = "10",
day = "1",
doi = "10.1016/j.ultramic.2017.05.001",
language = "English",
volume = "181",
pages = "86--96",
journal = "Ultramicroscopy",
issn = "0304-3991",
publisher = "Elsevier",

}

Accuracy and precision of thickness determination from position-averaged convergent beam electron diffraction patterns using a single-parameter metric. / Pollock, J A; Weyland, M; Taplin, D J; Allen, L J; Findlay, S D.

In: Ultramicroscopy, Vol. 181, 01.10.2017, p. 86-96.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Accuracy and precision of thickness determination from position-averaged convergent beam electron diffraction patterns using a single-parameter metric

AU - Pollock, J A

AU - Weyland, M

AU - Taplin, D J

AU - Allen, L J

AU - Findlay, S D

PY - 2017/10/1

Y1 - 2017/10/1

N2 - Position-averaged convergent beam electron diffraction patterns are formed by averaging the transmission diffraction pattern while scanning an atomically-fine electron probe across a sample. Visual comparison between experimental and simulated patterns is increasingly being used for sample thickness determination. We explore automating the comparison via a simple sum square difference metric. The thickness determination is shown to be accurate (i.e. the best-guess deduced thickness generally concurs with the true thickness), though factors such as noise, mistilt and inelastic scattering reduce the precision (i.e. increase the uncertainty range). Notably, the precision tends to be higher for smaller probe-forming aperture angles.

AB - Position-averaged convergent beam electron diffraction patterns are formed by averaging the transmission diffraction pattern while scanning an atomically-fine electron probe across a sample. Visual comparison between experimental and simulated patterns is increasingly being used for sample thickness determination. We explore automating the comparison via a simple sum square difference metric. The thickness determination is shown to be accurate (i.e. the best-guess deduced thickness generally concurs with the true thickness), though factors such as noise, mistilt and inelastic scattering reduce the precision (i.e. increase the uncertainty range). Notably, the precision tends to be higher for smaller probe-forming aperture angles.

KW - Position averaged convergent beam electron diffraction (PACBED)

KW - Scanning transmission electron microscopy (STEM)

KW - Thickness measurement

UR - http://www.scopus.com/inward/record.url?scp=85019920500&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2017.05.001

DO - 10.1016/j.ultramic.2017.05.001

M3 - Article

VL - 181

SP - 86

EP - 96

JO - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

ER -