A study of angular effects in focused ion beam milling of water ice

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1 - 8
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	9
Publication status	Published - 2008
Externally published	Yes

Cite this

@article{bb531e6bb50d4765aef023d30e6e1697,

title = "A study of angular effects in focused ion beam milling of water ice",

author = "Jing Fu and Sanjay Joshi and Jeffrey Catchmark",

year = "2008",

language = "English",

volume = "18",

pages = "1 -- 8",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "9",

}