A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

James Friend, Yasuyuki Gouda, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1160 - 1167
Number of pages	7
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume	53
Issue number	6
DOIs	https://doi.org/10.1109/TUFFC.2006.1642514
Publication status	Published - 2006
Externally published	Yes

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T1 - A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

AU - Friend, James

AU - Gouda, Yasuyuki

AU - Nakamura, Kentaro

AU - Ueha, Sadayuki

PY - 2006

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

IS - 6

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