A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

James Friend, Yasuyuki Gouda, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journalArticleResearchpeer-review

35 Citations (Scopus)
Original languageEnglish
Pages (from-to)1160 - 1167
Number of pages7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number6
DOIs
Publication statusPublished - 2006
Externally publishedYes

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