A post-fabrication selective magnetic annealing technique in standard MEMS processes

A. Mohammadi, N. C. Karmakar, M. R. Yuce

Research output: Contribution to journalArticleOtherpeer-review

3 Citations (Scopus)

Abstract

A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.

Original languageEnglish
Article number221906
Number of pages4
JournalApplied Physics Letters
Volume109
Issue number22
DOIs
Publication statusPublished - 28 Nov 2016

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