Abstract
A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.
Original language | English |
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Article number | 221906 |
Number of pages | 4 |
Journal | Applied Physics Letters |
Volume | 109 |
Issue number | 22 |
DOIs | |
Publication status | Published - 28 Nov 2016 |
Equipment
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Melbourne Centre for Nanofabrication
Sean Langelier (Manager)
Office of the Vice-Provost (Research and Research Infrastructure)Facility/equipment: Facility