Abstract
A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.
| Original language | English |
|---|---|
| Article number | 221906 |
| Number of pages | 4 |
| Journal | Applied Physics Letters |
| Volume | 109 |
| Issue number | 22 |
| DOIs | |
| Publication status | Published - 28 Nov 2016 |
Cite this
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A post-fabrication selective magnetic annealing technique in standard MEMS processes. / Mohammadi, A.; Karmakar, N. C.; Yuce, M. R.
In: Applied Physics Letters, Vol. 109, No. 22, 221906, 28.11.2016.Research output: Contribution to journal › Article › Other › peer-review
TY - JOUR
T1 - A post-fabrication selective magnetic annealing technique in standard MEMS processes
AU - Mohammadi, A.
AU - Karmakar, N. C.
AU - Yuce, M. R.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.
AB - A selective electrothermal magnetic annealing technique is introduced that provides programming capabilities for mechanical micro-resonators. In the proposed approach, the magnetic properties of resonators can be locally tuned in a post-fabrication batch-compatible process step. A prototype is implemented in a standard microfabrication process, where resonating ferromagnetic elements are suspended on top of a polysilicon resistive heater. The ferromagnetic elements consist of electroplated Nickel (Ni) with minor Iron (Fe) impurities. The electro-thermo-mechanical heating phenomenon is simulated for design purposes. The magnetization of micro-resonators with and without magnetic annealing is measured. The resulting magnetic property enhancement is illustrated by hysteresis (M-H) loop variations.
UR - http://www.scopus.com/inward/record.url?scp=85000789282&partnerID=8YFLogxK
U2 - 10.1063/1.4971262
DO - 10.1063/1.4971262
M3 - Article
VL - 109
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 22
M1 - 221906
ER -