| Original language | English |
|---|---|
| Pages (from-to) | 740 - 747 |
| Number of pages | 8 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 135 |
| Issue number | 2 |
| Publication status | Published - 2007 |
| Externally published | Yes |
A non-contact linear bearing and actuator via ultrasonic levitation
Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha
Research output: Contribution to journal › Article › Research › peer-review
82
Citations
(Scopus)