A non-contact linear bearing and actuator via ultrasonic levitation

Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journalArticleResearchpeer-review

58 Citations (Scopus)
Original languageEnglish
Pages (from-to)740 - 747
Number of pages8
JournalSensors and Actuators, A: Physical
Volume135
Issue number2
Publication statusPublished - 2007
Externally publishedYes

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