A multi-scale simulation of tungsten film delamination from silicon substrate

Luming Shen, Zhen Chen

Research output: Contribution to journal › Article › Research › peer-review

23 Citations (Scopus)

Abstract

refereed journal article

Original language	English
Pages (from-to)	5036 - 5056
Number of pages	21
Journal	International Journal of Solids and Structures
Volume	42
Publication status	Published - 2005

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abstract = "refereed journal article",

author = "Luming Shen and Zhen Chen",

year = "2005",

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AU - Shen, Luming

AU - Chen, Zhen

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AB - refereed journal article

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M3 - Article

SN - 0020-7683

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EP - 5056

JO - International Journal of Solids and Structures

JF - International Journal of Solids and Structures

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