A multi-scale simulation of tungsten film delamination from silicon substrate

Luming Shen, Zhen Chen

Research output: Contribution to journalArticleResearchpeer-review

20 Citations (Scopus)

Abstract

refereed journal article
Original languageEnglish
Pages (from-to)5036 - 5056
Number of pages21
JournalInternational Journal of Solids and Structures
Volume42
Publication statusPublished - 2005

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