A multi-scale simulation of tungsten film delamination from silicon substrate

Luming Shen, Zhen Chen

Research output: Contribution to journal › Article › Research › peer-review

22 Citations (Scopus)

Abstract

refereed journal article

Original language	English
Pages (from-to)	5036 - 5056
Number of pages	21
Journal	International Journal of Solids and Structures
Volume	42
Publication status	Published - 2005

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author = "Luming Shen and Zhen Chen",

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AU - Chen, Zhen

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JO - International Journal of Solids and Structures

JF - International Journal of Solids and Structures

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