A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor

Lujun Ji, Yong Zhu, Seyed Moheimani, Mehmet Yuce

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

15 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2010
EditorsEvgeny Katz
Place of PublicationNew York USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages1464 - 1467
Number of pages4
ISBN (Print)9781424481682
DOIs
Publication statusPublished - 2010
Externally publishedYes
EventIEEE Conference on Sensors 2010 - Waikoloa, United States of America
Duration: 1 Nov 20104 Nov 2010
Conference number: 9th
https://ieeexplore.ieee.org/xpl/conhome/5678851/proceeding (Proceedings)

Conference

ConferenceIEEE Conference on Sensors 2010
Abbreviated titleSENSORS 2010
CountryUnited States of America
CityWaikoloa
Period1/11/104/11/10
Internet address

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