A micro-particle positioning technique combining an ultrasonic manipulator and a microgripper

Adrian Neild, Stefano Oberti, Felix Beyeler, Jurg Dual, Bradley J Nelson

Research output: Contribution to journalArticleResearchpeer-review

66 Citations (Scopus)
Original languageEnglish
Pages (from-to)1562 - 1570
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume16
DOIs
Publication statusPublished - 2006

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