A MEMS nanopositioner with thermal actuator and on-chip thermal sensor

Yong Zhu, Seyed O R Moheimani, Mehmet Yuce

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2010
EditorsThomas Kenny
Place of PublicationNew York USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages296 - 299
Number of pages4
ISBN (Print)9781424481682
Publication statusPublished - 2010
Externally publishedYes
EventIEEE Conference on Sensors 2010 - Kona Hawaii USA, Waikoloa, United States of America
Duration: 1 Nov 20104 Nov 2010
Conference number: 9th


ConferenceIEEE Conference on Sensors 2010
Abbreviated titleSENSORS 2010
CountryUnited States of America

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