A MEMS capacitive pH sensor for high acidic and basic solutions

Md. Shamsul Arefin, M. Bulut Coskun, Tuncay Alan, Adrian Neild, Jean-Michel Redoute, Mehmet R. Yuce

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Abstract

We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body.

Original languageEnglish
Title of host publication13th IEEE SENSORS Conference, SENSORS 2014
Subtitle of host publicationValencia, Spain; 2-5 November 2014
Place of PublicationPiscataway NJ USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages1792-1794
Number of pages3
ISBN (Electronic)9781479901616, 9781479901623
ISBN (Print)9781479901609
DOIs
Publication statusPublished - 12 Dec 2014
EventIEEE Conference on Sensors 2014 - Valencia Conference Centre, Valencia, Spain
Duration: 2 Nov 20145 Nov 2014
Conference number: 13th

Publication series

NameProceedings of IEEE Sensors
PublisherInstitute of Electrical and Electronics Engineers
Volume2014
ISSN (Print)1930-0395

Conference

ConferenceIEEE Conference on Sensors 2014
Abbreviated titleSENSORS 2014
CountrySpain
CityValencia
Period2/11/145/11/14

Keywords

  • Capacitive
  • Fringing field
  • MEMS
  • PH sensor

Cite this

Arefin, M. S., Coskun, M. B., Alan, T., Neild, A., Redoute, J-M., & Yuce, M. R. (2014). A MEMS capacitive pH sensor for high acidic and basic solutions. In 13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014 (pp. 1792-1794). [6985373] (Proceedings of IEEE Sensors; Vol. 2014). Piscataway NJ USA: IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICSENS.2014.6985373
Arefin, Md. Shamsul ; Coskun, M. Bulut ; Alan, Tuncay ; Neild, Adrian ; Redoute, Jean-Michel ; Yuce, Mehmet R. / A MEMS capacitive pH sensor for high acidic and basic solutions. 13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014. Piscataway NJ USA : IEEE, Institute of Electrical and Electronics Engineers, 2014. pp. 1792-1794 (Proceedings of IEEE Sensors).
@inproceedings{66d8dc6da81c4ef283bc8d6c5f035bed,
title = "A MEMS capacitive pH sensor for high acidic and basic solutions",
abstract = "We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body.",
keywords = "Capacitive, Fringing field, MEMS, PH sensor",
author = "Arefin, {Md. Shamsul} and Coskun, {M. Bulut} and Tuncay Alan and Adrian Neild and Jean-Michel Redoute and Yuce, {Mehmet R.}",
year = "2014",
month = "12",
day = "12",
doi = "10.1109/ICSENS.2014.6985373",
language = "English",
isbn = "9781479901609",
series = "Proceedings of IEEE Sensors",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
pages = "1792--1794",
booktitle = "13th IEEE SENSORS Conference, SENSORS 2014",
address = "United States of America",

}

Arefin, MS, Coskun, MB, Alan, T, Neild, A, Redoute, J-M & Yuce, MR 2014, A MEMS capacitive pH sensor for high acidic and basic solutions. in 13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014., 6985373, Proceedings of IEEE Sensors, vol. 2014, IEEE, Institute of Electrical and Electronics Engineers, Piscataway NJ USA, pp. 1792-1794, IEEE Conference on Sensors 2014, Valencia, Spain, 2/11/14. https://doi.org/10.1109/ICSENS.2014.6985373

A MEMS capacitive pH sensor for high acidic and basic solutions. / Arefin, Md. Shamsul; Coskun, M. Bulut; Alan, Tuncay; Neild, Adrian; Redoute, Jean-Michel; Yuce, Mehmet R.

13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014. Piscataway NJ USA : IEEE, Institute of Electrical and Electronics Engineers, 2014. p. 1792-1794 6985373 (Proceedings of IEEE Sensors; Vol. 2014).

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

TY - GEN

T1 - A MEMS capacitive pH sensor for high acidic and basic solutions

AU - Arefin, Md. Shamsul

AU - Coskun, M. Bulut

AU - Alan, Tuncay

AU - Neild, Adrian

AU - Redoute, Jean-Michel

AU - Yuce, Mehmet R.

PY - 2014/12/12

Y1 - 2014/12/12

N2 - We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body.

AB - We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body.

KW - Capacitive

KW - Fringing field

KW - MEMS

KW - PH sensor

UR - http://www.scopus.com/inward/record.url?scp=84931064623&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2014.6985373

DO - 10.1109/ICSENS.2014.6985373

M3 - Conference Paper

SN - 9781479901609

T3 - Proceedings of IEEE Sensors

SP - 1792

EP - 1794

BT - 13th IEEE SENSORS Conference, SENSORS 2014

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Piscataway NJ USA

ER -

Arefin MS, Coskun MB, Alan T, Neild A, Redoute J-M, Yuce MR. A MEMS capacitive pH sensor for high acidic and basic solutions. In 13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014. Piscataway NJ USA: IEEE, Institute of Electrical and Electronics Engineers. 2014. p. 1792-1794. 6985373. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2014.6985373