A MEMS capacitive pH sensor for high acidic and basic solutions

Md. Shamsul Arefin, M. Bulut Coskun, Tuncay Alan, Adrian Neild, Jean-Michel Redoute, Mehmet R. Yuce

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

8 Citations (Scopus)


We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body.

Original languageEnglish
Title of host publication13th IEEE SENSORS Conference, SENSORS 2014
Subtitle of host publicationValencia, Spain; 2-5 November 2014
Place of PublicationPiscataway NJ USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages3
ISBN (Electronic)9781479901616, 9781479901623
ISBN (Print)9781479901609
Publication statusPublished - 12 Dec 2014
EventIEEE Conference on Sensors 2014 - Valencia Conference Centre, Valencia, Spain
Duration: 2 Nov 20145 Nov 2014
Conference number: 13th

Publication series

NameProceedings of IEEE Sensors
PublisherInstitute of Electrical and Electronics Engineers
ISSN (Print)1930-0395


ConferenceIEEE Conference on Sensors 2014
Abbreviated titleSENSORS 2014


  • Capacitive
  • Fringing field
  • MEMS
  • PH sensor

Cite this

Arefin, M. S., Coskun, M. B., Alan, T., Neild, A., Redoute, J-M., & Yuce, M. R. (2014). A MEMS capacitive pH sensor for high acidic and basic solutions. In 13th IEEE SENSORS Conference, SENSORS 2014: Valencia, Spain; 2-5 November 2014 (pp. 1792-1794). [6985373] (Proceedings of IEEE Sensors; Vol. 2014). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ICSENS.2014.6985373