A low-profile design for the noncontact ultrasonically levitated stage

Takeshi Ide, James Friend, Kentaro Nakamura, Sadayuki Ueha

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)4662 - 4665
Number of pages4
JournalJapanese Journal of Applied Physics
Volume44
Issue number6B
Publication statusPublished - 2005
Externally publishedYes

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