A low-less MEMS tunable capacitor with movable dielectric

Yong Zhu, Mehmet Yuce, Seyed O R Moheimani

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2009
EditorsPaddy J French
Place of PublicationNew York USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages651 - 654
Number of pages4
ISBN (Print)9781424445486
Publication statusPublished - 2009
Externally publishedYes
EventIEEE Conference on Sensors 2009 - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009
Conference number: 8th
https://ieeexplore.ieee.org/xpl/conhome/5379507/proceeding (Proceedings)


ConferenceIEEE Conference on Sensors 2009
Abbreviated titleSENSORS 2009
Country/TerritoryNew Zealand
Internet address

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