A low-flicker-noise MEMS electrothermal displacement sensing technique

Ali Mohammadi, Mehmet Yuce, Reza Moheimani

Research output: Contribution to journalArticleResearchpeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)1279 - 1281
Number of pages3
JournalJournal of Microelectromechanical Systems
Volume21
Issue number6
DOIs
Publication statusPublished - 2012

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