A comparison of two excitation modes for MEMS electrothermal displacement sensors

Ali Mohammadi, Seyed O Reza Moheimani, Mehmet Yuce

Research output: Contribution to journalArticleOtherpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)584 - 586
Number of pages3
JournalIEEE Electron Device Letters
Volume35
Issue number5
DOIs
Publication statusPublished - 2014

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