@inproceedings{3f9b833fe1b14798bdc6970dc051a49b,
title = "A comparative study of the strength of Si, SiN and SiC used at nanoscales",
author = "Tuncay Alan and Pasqualina Sarro",
year = "2008",
doi = "10.1557/PROC-1052-DD06-31",
language = "English",
isbn = "0272-9172",
volume = "1052",
pages = "241 -- 245",
editor = "Mark Spearing",
booktitle = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
address = "United States of America",
note = "Materials Research Society Symposium (MRS) 2008 ; Conference date: 01-01-2008",
}