A comparative study of the strength of Si, SiN and SiC used at nanoscales

Tuncay Alan, Pasqualina Sarro

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings
Editors	Mark Spearing
Place of Publication	United States
Publisher	Materials Research Society
Pages	241 - 245
Number of pages	5
Volume	1052
ISBN (Print)	0272-9172
DOIs	https://doi.org/10.1557/PROC-1052-DD06-31
Publication status	Published - 2008
Externally published	Yes
Event	Materials Research Society Symposium (MRS) 2008 - Boston USA, United States Duration: 1 Jan 2008 → …

Conference	Materials Research Society Symposium (MRS) 2008
City	United States
Period	1/01/08 → …

Access to Document

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title = "A comparative study of the strength of Si, SiN and SiC used at nanoscales",

author = "Tuncay Alan and Pasqualina Sarro",

year = "2008",

doi = "10.1557/PROC-1052-DD06-31",

language = "English",

isbn = "0272-9172",

volume = "1052",

pages = "241 -- 245",

editor = "Mark Spearing",

booktitle = "Materials Research Society Symposium Proceedings",

publisher = "Materials Research Society",

address = "United States of America",

note = "Materials Research Society Symposium (MRS) 2008 ; Conference date: 01-01-2008",

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T1 - A comparative study of the strength of Si, SiN and SiC used at nanoscales

AU - Alan, Tuncay

AU - Sarro, Pasqualina

PY - 2008

Y1 - 2008

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U2 - 10.1557/PROC-1052-DD06-31

DO - 10.1557/PROC-1052-DD06-31

M3 - Conference Paper

SN - 0272-9172

VL - 1052

SP - 241

EP - 245

BT - Materials Research Society Symposium Proceedings

A2 - Spearing, Mark

PB - Materials Research Society

CY - United States

T2 - Materials Research Society Symposium (MRS) 2008

Y2 - 1 January 2008

ER -