A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Daniel Kuang-Chen Liu, James Friend, Leslie Yeo

Research output: Contribution to journalArticleResearchpeer-review

72 Citations (Scopus)
Original languageEnglish
Pages (from-to)115 - 123
Number of pages9
JournalAcoustical Science and Technology
Volume31
Issue number2
DOIs
Publication statusPublished - 2010

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