3-D Materials Characterization Over a Range of Time and Length Scales

The University of Manchester, UK's largest single-site university, has a long history of pioneering research in materials science. The School's Electron Microscopy Centre (EMC) is a leading international facility. It actively encourages collaborations with national and international partners, and is intentionally structured to be openly available to academic and industrial users. The Centre acquired its first DualBeam in 2008 for micromachining, 3-D EBSD imaging, and stress measurement around small holes and slots. The heavy workload led to adding a second DualBeam, primarily for TEM sample preparation. Using the high efficiency EDS system and aberration corrected imaging capabilities of the Titan STEM, information regarding atomic structure and faceting can be correlated with the observed elemental distribution. Mostly carbon is detected by EDX in the graphene patch. However, there are oxygen impurity atoms (blue dots) and an occasional Ti atom (red dot).