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Conference Paper
2007

Optical and thermal comparative study of a soft x-ray lithography beamline for the Australian Synchrotron

Altissimo, M., Wang, D. & Wilkins, S., 2007, AIP Conference Proceedings. Choi, J-Y. & Rah, S. (eds.). New York, USA: American Institute of Physics, p. 1486 - 1489 4 p.

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